ITEM

MODEL

DESCRIPTION

1

BD-8

*Weight around 120 Kg 重量120Kg
*Dimensions: 780mmW X 660mmD X 700mmH宽780mm,长660mm,高700mm

*8”chuck and Center hole 250 micron (if needed) for single die as small as 300micronx300micron 8寸载物台，最小样品尺寸可?? 300micronx300micron
*Chuck flatness: 5um? 载物台平坦度5微米

* Huge Knob Stage X-Y Travel 8”-8” with lock each? 台子可以锁，X-Y轴8”-8”的移动

*1 micron Resolution? Backlash Free? 25mm/Drive? 25mm/圈无域度快速移动，1Micr的精度
*Standard Chuck theta 15 Degree Backlash free 平台的旋转角度是15度

* mechanism 4 mm quick with lever with 1 mcron resolution芯片载台可快速机械调节Z轴方向4mm，精度可达1微米

*Platen Up/Down quick 6 mm by easy-gripped lever handle with lock 针座平台可快速上升下降6mm，快速上升下降可以锁定

*Platen Up/Down fine 25 mm by huge knob with resolution 1 micron 平台上升下降25mm,精度1Micro
* For probing height adjustable specifically for probe card tip overdrive setup 可调整放置探针卡

2

光学部分

High resolution of MITUTOYO? 高分辩MITUTOYO显微镜
*Continuous Zoom 1X ~2X? 二倍光学放大
Eyepiece 目镜：10X wide field 广视角 10倍目镜
Objective 2X（Working distance: 34mm）2倍物镜工作距离 34mm
10X（Working distance: 33.5mm） 10倍物镜 工作距离33.5mm
20X（Working distance: 20mm） 20倍物镜 工作距离22mm
50X（Working distance:20.5mm） 50倍物镜 工作距离20.5mm
100X（Working distance: 13mm） 100倍物镜 工作距离13mm
*150W high power white Light Intensity Stepless Control 150W白光光源

*Microscope X-Y? travel 2”x2” 1 micron resolution 显微镜可X-Y轴移动2”x2” 精度1micron
*Microscope coarse Z travel显微镜粗调焦距50.8mm

3

探针座

*Vacuum base 真空吸附底座
*X-Y-Z 12mm-12mm-12mm X-Y-Z方向上可做12mm的微调
*Linear Motion 线性运动
*0.7Micro? Resolution 精度是0.7微米
*Coaxial Tip holder spring，50Ohm 三轴隔离保护针臂，50欧姆阻抗

4

探针

Probe Tip , 0.2micron 0.6 micron 1 micron 2 micron 10 micron